Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
نویسندگان
چکیده
منابع مشابه
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s17051121